Fig. 1. Beam is incident at an angle of β onto a one-dimensional matrix grating

Fig. 2. Variation of diffraction efficiency of a 40 μm periodic grating with grating height

Fig. 3. Diffraction efficiency variation with grid height of 6～30 μm

Fig. 4. Polarized microscope image of a 40 μm grating sample with a period

Fig. 5. Diffraction efficiency test device diagram

Fig. 6. Diffraction pattern of grating samples

Fig. 7. Diffraction efficiency of samples with a period of 40 μm

Fig. 8. Grating with ablation

Fig. 9. Ideal state and concave state at the grating bar

Fig. 10. Curve changes with concave states