Chinese Optics, Volume. 15, Issue 2, 161(2022)

Advances in research and applications of optical aspheric surface metrology

Zi-jian LIANG, Yong-ying YANG*, Hong-yang ZHAO, and Sheng-an LIU
Author Affiliations
  • State Key Lab of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China
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    Figures & Tables(37)
    Classification of optical aspheric surface testing technology
    High-accuracy devices using a mechanical probes[63-64]
    Schematic diagrams of the Hartman & Shack-Hartman tests
    Schematic diagrams of structured light methods
    Research and application of the PMD method[21,71]
    Schematic diagram of the Ronchi test
    Schematic diagram of the Foucault knife-edge test
    Schematic diagrams of testing paraboloids using aberration-free point method
    Schematic diagrams of null test by the refractive compensator
    Schematic diagrams of CGH with a carrier
    Principle diagram of CGH
    Null test using CGH (by Wyant J C)
    Optical layout model of the CGH test plate
    Optical layout model of the CGH zone plate
    Null tests of optical aspheric surface using DM[35.38,96]
    Null test of the aspheric surface using SLM[43]
    Basic flows of the IRO algorithm
    Optical layout of the non-null test using singlet PNC[46]
    Optical layout of the non-null test using aspheric PNC[106]
    Optical layout of the non-null test using reflective PNC[107]
    Schematic diagram of the ASSI method
    ZYGO Verifire interferometer by using the annular sub-aperture division mode like in the ASSI method[111]
    Schematic diagram of the CSSI method
    QED interferometer based on CSSI and VON[41]
    An example of the overlapping-area-stitching algorithm
    Schematic diagram of the TWI method[54]
    Pictures of the Lupho Scan profiler[63]
    Pictures of SOC-CMM[117-118]
    Classification of shearing interferometry
    Aspheric surface testing based on QWLSI[122]
    Principle model of annular RSI
    Dimetior AS interferometer based on the SNI method
    Optical layout of the metrology systems using PNC
    Schematic diagram of PNC adjustment
    Optical layout of the aspheric test based on CGH
    • Table 1. Comparison of common RE calibration algorithms

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      Table 1. Comparison of common RE calibration algorithms

      方法理论条件精度速度
      GDI小畸变近似理论黑盒较低较快
      TRW参考波面替代理论白盒一般较快
      IRO系统函数的不变性白盒较慢
    • Table 2. Summary of widely used interferometric metrology methods of optics aspheric surfaces

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      Table 2. Summary of widely used interferometric metrology methods of optics aspheric surfaces

      方法类别检测原理通用性检测精度动态范围检测效率
      CGH零位补偿法衍射补偿器较小
      PNC部分补偿法部分补偿、回程误差校正较好较高,取决于回程误差校正较大
      子孔径拼接法(SSI)子孔径检测、拼接算法较高,取决于回程误差校正
      自适应补偿法自适应补偿器较高较大
      TWI倾斜波前法倾斜子光束检测不同区域较好较高,取决于回程误差校正较小较高
      剪切干涉法剪切率调节系统动态范围较好较高,取决于回程误差校正可调
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    Zi-jian LIANG, Yong-ying YANG, Hong-yang ZHAO, Sheng-an LIU. Advances in research and applications of optical aspheric surface metrology[J]. Chinese Optics, 2022, 15(2): 161

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    Paper Information

    Category: Research Articles

    Received: Jul. 26, 2021

    Accepted: --

    Published Online: Mar. 28, 2022

    The Author Email:

    DOI:10.37188/CO.2021-0143

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