Chinese Optics, Volume. 15, Issue 2, 161(2022)

Advances in research and applications of optical aspheric surface metrology

Zi-jian LIANG, Yong-ying YANG*, Hong-yang ZHAO, and Sheng-an LIU
Author Affiliations
  • State Key Lab of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China
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    Optical Systems using aspheric components (especially for free-form ones) have remarkable advantages over traditional spherical systems in that they can satisfy complicated requirements with simple optical-mechanical structures relying on abundant optional design parameters. Surface testing is an essential process for ensuring accuracy in manufacturing. Therefore, plenty of testing methods have been developed to meet varying testing demands of different types of surfaces at different stages in manufacturing. This paper summarizes the history of aspheric surface testing technology, classifies available techniques by whether they use interferometry, then introduces corresponding technical indexes, applicable conditions, research progress and applications. This paper highlights the high-precision interferometric methods, basic principles, optical layout and testing performances of every measurement method classified into Null and Non-null testing. The pros and cons of each method are compared, relative algorithms are introduced and precise adjustment methods are discussed.

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    Zi-jian LIANG, Yong-ying YANG, Hong-yang ZHAO, Sheng-an LIU. Advances in research and applications of optical aspheric surface metrology[J]. Chinese Optics, 2022, 15(2): 161

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    Paper Information

    Category: Research Articles

    Received: Jul. 26, 2021

    Accepted: --

    Published Online: Mar. 28, 2022

    The Author Email:

    DOI:10.37188/CO.2021-0143

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