Multi‑Channel Parallel Fiber Direct Laser Writing System (Invited)

Na Zhang; Hao Luo; Yiwei Qiu; Gangyao Zhan; Jisen Wen; Lü Bihu; Cuifang Kuang; Dazhao Zhu; Xu Liu

doi:10.3788/CJL240518

Chinese Journal of Lasers, Volume. 51, Issue 12, 1202413(2024)

Multi‑Channel Parallel Fiber Direct Laser Writing System (Invited)

Na Zhang¹, Hao Luo³, Yiwei Qiu⁴, Gangyao Zhan⁴, Jisen Wen³, Lü Bihu⁵, Cuifang Kuang^2、*, Dazhao Zhu³, and Xu Liu²

Author Affiliations

¹Research Center for High Performance Computing System, Zhejiang Lab , Hangzhou, Zhejiang 311121, China

²State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou , Zhejiang 310027, China

³Frontier Fundamental Research Center, Zhejiang Lab , Hangzhou, Zhejiang 311121, China

⁴Research Center for Novel Computational Sensing and Intelligent Processing, Zhejiang Lab , Hangzhou, Zhejiang 311121, China

⁵Department of Scientific Research Conditions Management, Zhejiang Lab , Hangzhou, Zhejiang 311121, China

show less

Abstract Get PDF(in Chinese)

References(24)

[1] Wanzenboeck H D, Waid S[M]. Focused ion beam lithography(2011).

[2] Vieu C, Carcenac F, Pépin A et al. Electron beam lithography: resolution limits and applications[J]. Applied Surface Science, 164, 111-117(2000).

[3] Hu T, Tseng C K, Fu Y H et al. Demonstration of color display metasurfaces via immersion lithography on a 12-inch silicon wafer[J]. Optics Express, 26, 19548-19554(2018).

[4] He M F, Zhu D Z, Wang H Q et al. Advancements in micro-nano optical device based on two-photon direct writing[J]. Acta Optica Sinica, 43, 1623013(2023).

[5] Gissibl T, Thiele S, Herkommer A et al. Two-photon direct laser writing of ultracompact multi-lens objectives[J]. Nature Photonics, 10, 554-560(2016).

[6] Porte X, Dinc N U, Moughames J et al. Direct (3+1)D laser writing of graded-index optical elements[J]. Optica, 8, 1281-1287(2021).

[7] Wu D, Wu S Z, Xu J et al. Hybrid femtosecond laser microfabrication to achieve true 3D glass/polymer composite biochips with multiscale features and high performance: the concept of ship-in-a-bottle biochip[J]. Laser & Photonics Reviews, 8, 458-467(2014).

[8] Liberale C, Cojoc G, Bragheri F et al. Integrated microfluidic device for single-cell trapping and spectroscopy[J]. Scientific Reports, 3, 1258(2013).

[9] Urbancova P, Pudis D, Goraus M et al. IP-dip-based SPR structure for refractive index sensing of liquid analytes[J]. Nanomaterials, 11, 1163(2021).

[10] Aristov A I, Manousidaki M, Danilov A et al. 3D plasmonic crystal metamaterials for ultra-sensitive biosensing[J]. Scientific Reports, 6, 25380(2016).

[11] Maigyte L, Purlys V, Trull J et al. Flat lensing in the visible frequency range by woodpile photonic crystals[J]. Optics Letters, 38, 2376-2378(2013).

[12] Wolfesberger C, Wollhofen R, Buchegger B et al. Streptavidin functionalized polymer nanodots fabricated by visible light lithography[J]. Journal of Nanobiotechnology, 13, 27(2015).

[13] Kuroiwa Y, Takeshima N, Narita Y et al. Arbitrary micropatterning method in femtosecond laser microprocessing using diffractive optical elements[J]. Optics Express, 12, 1908-1915(2004).

[14] Tang M, Chen Z C, Huang Z Q et al. Maskless multiple-beam laser lithography for large-area nanostructure/microstructure fabrication[J]. Applied Optics, 50, 6536-6542(2011).

[15] Yang L, El-Tamer A, Hinze U et al. Parallel direct laser writing of micro-optical and photonic structures using spatial light modulator[J]. Optics and Lasers in Engineering, 70, 26-32(2015).

[16] Gittard S D, Nguyen A, Obata K et al. Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator[J]. Biomedical Optics Express, 2, 3167-3178(2011).

[17] Obata K, Koch J, Hinze U et al. Multi-focus two-photon polymerization technique based on individually controlled phase modulation[J]. Optics Express, 18, 17193-17200(2010).

[18] Wang H Q, Wen J S, Yang Z Y et al. High-speed parallel two-photon laser direct writing lithography system[J]. Chinese Journal of Lasers, 49, 2202009(2022).

[19] Geng Q, Wang D E, Chen P F et al. Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization[J]. Nature Communications, 10, 2179(2019).

[20] Dinh D H, Chien H L, Lee Y C. Maskless lithography based on digital micromirror device (DMD) and double sided microlens and spatial filter array[J]. Optics & Laser Technology, 113, 407-415(2019).

[21] Gan Z S, Cao Y Y, Evans R A et al. Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size[J]. Nature Communications, 4, 2061(2013).

[22] Li Y, Qi F J, Yang H et al. Nonuniform shrinkage and stretching of polymerized nanostructures fabricated by two-photon photopolymerization[J]. Nanotechnology, 19, 055303(2008).

[23] Zhou G Z, He M F, Yang Z Y et al. Dual-beam laser direct writing nano-lithography system based on peripheral photoinhibition technology[J]. Chinese Journal of Lasers, 49, 0202001(2022).

[24] Li X P, Cao Y Y, Tian N et al. Multifocal optical nanoscopy for big data recording at 30 TB capacity and gigabits/second data rate[J]. Optica, 2, 567-570(2015).

Tools

Get Citation

Copy Citation Text

Na Zhang, Hao Luo, Yiwei Qiu, Gangyao Zhan, Jisen Wen, Lü Bihu, Cuifang Kuang, Dazhao Zhu, Xu Liu. Multi‑Channel Parallel Fiber Direct Laser Writing System (Invited)[J]. Chinese Journal of Lasers, 2024, 51(12): 1202413

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Laser Micro-Nano Manufacturing

Received: Jan. 22, 2024

Accepted: Apr. 8, 2024

Published Online: Jun. 3, 2024

The Author Email: Kuang Cuifang (cfkuang@zju.edu.cn)

DOI:10.3788/CJL240518

CSTR:32183.14.CJL240518

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology