Fig. 1. Schematic of multichannel parallel fiber direct laser writing system. (a) Optical path; (b) fiber path of single channel; (c) beam split module of ten channels; (d) distribution of excitation light spots at focal plane; (e) diagram of experimental setup

Fig. 2. Top view of OrmoGreen photoresist printing results. (a) Suspended line (substrate level); (b) suspended line (substrate tilt 30°); (c) half ball structure; (d) microtube structure

Fig. 3. AZ5214 photoresist printing results based on single channel. (a) Featured line arrays; (b) programming printing

Fig. 4. Ten channels spacing uniformity

Fig. 5. Ten channels system printing results. (a) Fork grating; (b) partial enlargement of Fig. (a); (c) logo of Zhejiang lab; (d) partial enlargement of Fig. (c); (e) grating structure; (f) partial enlargement of Fig. (e)