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Acta Optica Sinica, Volume. 42, Issue 18, 1812004(2022)

Design, Calibration, and Measurement of Single Wavelength Mid-Infrared Mueller Matrix Ellipsometer

Zhou Zheng1,2 and Junfeng Hou1,2、*
Author Affiliations
  • 1National Astronomical Observatories of Chinese Academy of Sciences, Beijing 100101, China
  • 2School of Astronomy and Space Science, University of Chinese Academy of Sciences, Beijing 100049, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (9)
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    Figures & Tables(9)
    Schematic diagram of Mueller matrix ellipsometer

    Fig. 1. Schematic diagram of Mueller matrix ellipsometer

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    Schematic diagram of Mueller matrix measurement based on nonlinear fitting

    Fig. 2. Schematic diagram of Mueller matrix measurement based on nonlinear fitting

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    Schematic diagram of double rotating Mueller matrix measurement

    Fig. 3. Schematic diagram of double rotating Mueller matrix measurement

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    Design of mid-infrared Mueller matrix ellipsometer

    Fig. 4. Design of mid-infrared Mueller matrix ellipsometer

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    Diagram of experimental device

    Fig. 5. Diagram of experimental device

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    Stability of detection intensity

    Fig. 6. Stability of detection intensity

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    Relationship between phase retardation and matrix element value

    Fig. 7. Relationship between phase retardation and matrix element value

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    Mueller matrices of reflected sample

    Fig. 8. Mueller matrices of reflected sample

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    Corresponding standard deviation σ of Mueller matrices in Fig. 8

    Fig. 9. Corresponding standard deviation σ of Mueller matrices in Fig. 8

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    Zhou Zheng, Junfeng Hou. Design, Calibration, and Measurement of Single Wavelength Mid-Infrared Mueller Matrix Ellipsometer[J]. Acta Optica Sinica, 2022, 42(18): 1812004

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 13, 2022

    Accepted: Mar. 25, 2022

    Published Online: Sep. 15, 2022

    The Author Email: Hou Junfeng (jfhou@bao.ac.cn)

    DOI:10.3788/AOS202242.1812004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology