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Chinese Optics Letters, Volume. 10, Issue 6, 061202(2012)

Novel technique for characterizing feature profiles in photolithography process

Fan Wang, Hailiang Lu, Qingyun Zhang, and Anatoly Burov
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Fan Wang, Hailiang Lu, Qingyun Zhang, Anatoly Burov, "Novel technique for characterizing feature profiles in photolithography process," Chin. Opt. Lett. 10, 061202 (2012)

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Nov. 15, 2011

Accepted: Dec. 28, 2011

Published Online: Mar. 13, 2012

The Author Email:

DOI:10.3788/col201210.061202

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laser devices and laser physics
Lasers and Laser Optics
Laser physics
laser manufacturing
Instrumentation, Measurement and Metrology