Improvement of torque measurement accurac<i>Y</i> in piezoelectric four-dimensional force sensors

Table 1. Result of system scale calibration
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Table 1. Result of system scale calibration
类别符号数量分布
位置误差 $Δ l_{i j}$ 8 $N (0, {(6.67 \times 10^{- 5})}^{2})$
传感器转角 $α_{i}$ 4 $N (0,0.005 8^{2})$
晶组转角 $θ_{i j}$ 12 $N (0,0.002 9^{2})$
灵敏度误差 $k_{i j}$ 12 $N (1,0 . 01^{2})$

Table 2. Static performance metrics
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Table 2. Static performance metrics
测量方向向间干扰/% 线性度/% 重复性误差/%
Z向 X向 Y向 M向
Z向 — 0.17 -0.78 0.09 -0.16 -0.34
X向 0.44 — 2.70 -0.81 0.06 0.03
Y向 0.55 0.17 — 0.04 0.06 0.06
M_Z 0.46 2.16 -2.07 — 0.35 0.35

Table 3. Force sensor output voltage

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Table 3. Force sensor output voltage

加载点	$U_{1 x}$ + $U_{2 x}$	$U_{3 x}$ + $U_{4 x}$	$U_{1 y}$ + $U_{4 y}$	$U_{2 y}$ + $U_{3 y}$	$\sum_{i = 1}^{4} U_{i m}$
a1	10 043	-10 259	10 216	-9 366	28 291
a2	9 657	-10 386	10 745	-9 634	28 676
a3	9 584	-10 384	10 626	-9 626	28 533
a4	9 522	-10 180	10 785	-9 648	28 484
a5	10 196	-10 109	9 875	-9 080	27 841
b1	10 134	-10 185	9 847	-8 983	27 764
b2	10 281	-10 211	9 974	-9 057	28 044
b3	10 115	-10 110	10 255	-9 429	28 298
b4	10 032	-10 199	10 279	-9 444	28 335
b5	10 322	-10 461	10 248	-9 402	28 673
b6	10 335	-10 212	9 972	-9 066	28 066
b7	10 290	-10 053	10 281	-9 360	28 365
b8	9 818	-10 106	10 417	-9 558	28 294

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Jun ZHANG, Peng ZHANG, Xuande TENG, Jiale CAI, Yuhe WANG, Zongjin REN. Improvement of torque measurement accuracY in piezoelectric four-dimensional force sensors[J]. Optics and Precision Engineering, 2025, 33(10): 1584

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