[2] CUEVAS A, LUQUE A, EGUREN J et al. High efficiency bifacial back surface field solar cells. Solar Cells, 3, 337-340(1981).

[3] ZHANG T J, QU X Y, GUO Y G et al. The passivation characteristics of poly-Si/SiOx stack for high-efficiency silicon solar cells. Silicon, 15, 1659-1668(2023).

[4] WANG W J, LI H L, ZHOU C L et al. Manufacturing technology of crystalline silicon solar cells, 325(2014).

[5] SCHWARTZ R J, LAMMERT M D. Silicon solar cells for high concentration applications, 350-352(2005).

[6] ROSE D. Development and production of high performance silicon cells for PV panels and LCPV systems, 491-494(2014).

[7] REICHEL C, MÜLLER R, FELDMANN F et al. Influence of the transition region between p- and n-type polycrystalline silicon passivating contacts on the performance of interdigitated back contact silicon solar cells. Journal of Applied Physics, 122, 184502(2017).

[8] REN C C, ZHOU J K, ZHANG B Y et al. Status and prospective of high-efficiency c-Si solar cells based on tunneling oxide passivation contacts. Acta Physica Sinica, 70, 294-304(2021).

[9] DAI T G, TAN X, SONG Z C et al. Single-sided deposition of poly-Si in TOPCon solar cells. Journal of Synthetic Crystals, 53, 818-823(2024).

[10] HAASE F, HOLLEMANN C, SCHÄFER S et al. Laser contact openings for local poly-Si-metal contacts enabling 26.1%-efficient POLO-IBC solar cells. Solar Energy Materials and Solar Cells, 186, 184-193(2018).

[11] LI H L. BC battery out of cycle， detailed technical roadmap sorted out(2023). https：//www.yicai.com/news/101857656.html

[12] MA H N, LI F, ZHAO X L et al. Performances of polysilicon films prepared by LPCVD. Semiconductor Technology, 47, 630-635(2022).

[13] FELDMANN F, BIVOUR M, REICHEL C et al. Tunnel oxide passivated contacts as an alternative to partial rear contacts. Solar Energy Materials and Solar Cells, 131, 46-50(2014).

[14] FELDMANN F, SIMON M, BIVOUR M et al. Efficient carrier-selective p- and n-contacts for Si solar cells. Solar Energy Materials and Solar Cells, 131, 100-104(2014).

[15] TAO Y G, MADANI K, CHO E et al. High-efficiency selective boron emitter formed by wet chemical etch-back for n-type screen-printed Si solar cells, 110(2017).

[16] LANCASTER K, GROßER S, FELDMANN F et al. Study of pinhole conductivity at passivated carrier-selected contacts of silicon solar cells. Energy Procedia, 92, 116-121(2016).

[17] PEIBST R, RÖMER U, LARIONOVA Y et al. Working principle of carrier selective poly-Si/c-Si junctions： is tunnelling the whole story？. Solar Energy Materials and Solar Cells, 158, 60-67(2016).

[18] MA D. High-quality p-type tunneling oxide passivation contacts （p-TOPCon） and its application in TOPCon solar cells(2022).