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Acta Optica Sinica, Volume. 35, Issue 7, 705001(2015)

An Accurate Method for Measuring Interference Fringe Period in Scanning Beam Interference Lithography System

[in Chinese]1,2、*, [in Chinese]1, [in Chinese]1, [in Chinese]1, and [in Chinese]1,2
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Accurate Method for Measuring Interference Fringe Period in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2015, 35(7): 705001

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    Paper Information

    Category: Diffraction and Gratings

    Received: Nov. 20, 2014

    Accepted: --

    Published Online: May. 20, 2015

    The Author Email: (jiangshan0122@126.com)

    DOI:10.3788/aos201535.0705001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology