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Acta Physica Sinica, Volume. 69, Issue 8, 085201-1(2020)

Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe

Yu Zhou, Li-Yang Cao, Xiao-Ping Ma, Li-Li Deng, and Yu Xin*
Author Affiliations
  • Department of Physical Science and Technology, Soochow University, Suzhou 215006, China
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    Yu Zhou, Li-Yang Cao, Xiao-Ping Ma, Li-Li Deng, Yu Xin. Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe[J]. Acta Physica Sinica, 2020, 69(8): 085201-1

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    Received: Dec. 9, 2019

    Accepted: --

    Published Online: Nov. 24, 2020

    The Author Email:

    DOI:10.7498/aps.69.20191864

    Topics

    Nuclear physics
    Particles and fields
    Particle and nuclear astrophysics and cosmology