Laser & Optoelectronics Progress, Volume. 59, Issue 19, 1931003(2022)

High Crystallization Quality β-Ga2O3 Films Prepared by Chemical Vapor Deposition

Xingchen Li, Fengyuan Lin*, Huimin Jia, Yubin Kang, Yongji Shi, Bingheng Meng, Dan Fang, Jilong Tang, Dengkui Wang, Kexue Li, Xueying Chu, and Zhipeng Wei
Author Affiliations
  • State Key Laboratory of High Power Seminconductor Laser, College of Science, Changchun University of Science and Technology, Changchun130022, Jinlin, China
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    References(35)

    [1] Wang J, Luo L B. Advances in Ga2O3-based solar-blind ultraviolet photodetectors[J]. Chinese Journal of Lasers, 48, 1100001(2021).

    [13] Wei M Y, Lian J, Jiang Q F et al. Ellipsometry study on optical properties of two-dimensional platinum selenide film[J]. Chinese Journal of Lasers, 48, 1203002(2021).

    [14] Guo Y W, Li Y, Ma Z W. Research on symmetry of BaTiO3 film based on second-harmonic generation technology[J]. Acta Optica Sinica, 41, 0619001(2021).

    [18] Cheng P, Chen L, Wu K H. A new two-dimensional material: borophene[J]. Physics, 46, 214-221(2017).

    [35] Hu Y, Wang F W, Lin H L. Preparation and properties of La3GaSiO14 thin films by RF sputtering on MgO buffer layer[J]. Journal of Science and Engineering Technology, 3, 69-76(2007).

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    Xingchen Li, Fengyuan Lin, Huimin Jia, Yubin Kang, Yongji Shi, Bingheng Meng, Dan Fang, Jilong Tang, Dengkui Wang, Kexue Li, Xueying Chu, Zhipeng Wei. High Crystallization Quality β-Ga2O3 Films Prepared by Chemical Vapor Deposition[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1931003

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    Paper Information

    Category: Thin Films

    Received: Sep. 6, 2021

    Accepted: Oct. 11, 2021

    Published Online: Oct. 11, 2022

    The Author Email: Lin Fengyuan (linfengyuan_0116@163.com)

    DOI:10.3788/LOP202259.1931003

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