Laser & Optoelectronics Progress, Volume. 59, Issue 19, 1931003(2022)
High Crystallization Quality β-Ga2O3 Films Prepared by Chemical Vapor Deposition
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Xingchen Li, Fengyuan Lin, Huimin Jia, Yubin Kang, Yongji Shi, Bingheng Meng, Dan Fang, Jilong Tang, Dengkui Wang, Kexue Li, Xueying Chu, Zhipeng Wei. High Crystallization Quality β-Ga2O3 Films Prepared by Chemical Vapor Deposition[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1931003
Category: Thin Films
Received: Sep. 6, 2021
Accepted: Oct. 11, 2021
Published Online: Oct. 11, 2022
The Author Email: Lin Fengyuan (linfengyuan_0116@163.com)