Piezoelectrics & Acoustooptics, Volume. 45, Issue 3, 477(2023)

Study on the Sensitivity Mechanism of Thermal Oscillator Type Biaxial MEMS Angular Velocity Gyro

PIAO Linhua*, ZHANG Yan, TONG Jiacheng, and LI Bei
Author Affiliations
  • [in Chinese]
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    References(7)

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    PIAO Linhua, ZHANG Yan, TONG Jiacheng, LI Bei. Study on the Sensitivity Mechanism of Thermal Oscillator Type Biaxial MEMS Angular Velocity Gyro[J]. Piezoelectrics & Acoustooptics, 2023, 45(3): 477

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    Paper Information

    Received: Jun. 27, 2022

    Accepted: --

    Published Online: Dec. 5, 2023

    The Author Email: PIAO Linhua (bjplh@163.com)

    DOI:10.11977/j.issn.1004-2474.2023.03.029

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