Piezoelectrics & Acoustooptics, Volume. 45, Issue 3, 477(2023)
Study on the Sensitivity Mechanism of Thermal Oscillator Type Biaxial MEMS Angular Velocity Gyro
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PIAO Linhua, ZHANG Yan, TONG Jiacheng, LI Bei. Study on the Sensitivity Mechanism of Thermal Oscillator Type Biaxial MEMS Angular Velocity Gyro[J]. Piezoelectrics & Acoustooptics, 2023, 45(3): 477
Paper Information
Received: Jun. 27, 2022
Accepted: --
Published Online: Dec. 5, 2023
The Author Email: Linhua PIAO (bjplh@163.com)
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