Journal of Synthetic Crystals, Volume. 53, Issue 4, 585(2024)
Research Progress on Material Removal Non-Uniformity in Silicon Carbide Chemical Mechanical Polishing
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SUN Xinghan, LI Jihu, ZHANG Wei, ZENG Qunfeng, ZHANG Junfeng. Research Progress on Material Removal Non-Uniformity in Silicon Carbide Chemical Mechanical Polishing[J]. Journal of Synthetic Crystals, 2024, 53(4): 585
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Received: Oct. 27, 2023
Accepted: --
Published Online: Aug. 22, 2024
The Author Email: Qunfeng ZENG (xiaozeng0011@163.com)
CSTR:32186.14.
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