[1] The British Standards Institution. Optics and photonics: preparation of drawings for optical elements and systems: part 7 surface imperfection tolerances: ISO 10110-7[S]. UK: BSI Standards Limited(2008).

[2] General Administration of Quality Supervision, Inspection, Quarantine of the People's Republic of China, (2006).

[3] Liu Z Y, Zhang Y H, Ding J J et al. Propagation of a filamentary femtosecond laser beam with high intensities at an air-solid interface[J]. Chinese Optics Letters, 15, 021401(2017). http://www.opticsjournal.net/Articles/Abstract?aid=OJ170207000033WtZw3y

[4] Shavit O, Ferber Y, Papeer J et al. Femtosecond laser-induced damage threshold in snow micro-structured targets[J]. High Power Laser Science and Engineering, 6, e7(2018). http://www.cnki.com.cn/Article/CJFDTotal-HPLS201801007.htm

[5] Bercegol H, Bouchut P R, Lamaignère L et al. The impact of laser damage on the lifetime of optical components in fusion lasers[J]. Proceedings of SPIE, 5273, 312-324(2003).

[6] Zhang X, Zhou W, Dai W J et al. Surface phase defects induced downstream laser intensity modulation in high-power laser facility[J]. High Power Laser Science and Engineering, 4, e6(2016). http://www.cnki.com.cn/Article/CJFDTotal-HPLS201601006.htm

[7] Dai M K, Xu D Y. The present situation of imperfections testing and researching on the optical components[J]. Optical Instruments, 18, 33-36(1996).

[8] Baker L R. Microscope image comparator[J]. Optica Acta: International Journal of Optics, 31, 611-614(1984).

[9] Baker L R. Inspection of surface flaws by comparator microscopy[J]. Applied Optics, 27, 4620-4625(1988). http://www.ncbi.nlm.nih.gov/pubmed/20539625

[10] Baker L R. On-machine measurement of roughness, waviness, and flaws[J]. Proceedings of SPIE, 1333, 248-256(1990). http://spie.org/Publications/Proceedings/Paper/10.1117/12.22809

[11] Liberati F. Measure of surface and bulk defects in any transmitting or reflecting optical component[J]. Proceedings of SPIE, 1781, 170-174(1993). http://spie.org/Publications/Proceedings/Paper/10.1117/12.140966

[12] Yang Y Y, Lu C H, Liang J et al. Microscopic dark-field scattering imaging and digitalization evaluation system of defects on optical devices precision surface[J]. Acta Optica Sinica, 27, 1031-1038(2007).

[13] Liu D, Wang S T, Cao P et al. Dark-field microscopic image stitching method for surface defects evaluation of large fine optics[J]. Optics Express, 21, 5974-5987(2013). http://www.ncbi.nlm.nih.gov/pubmed/23482166

[14] Luo M, Bu Y, Xu J H et al. Optical element surface defect measurement based on multispectral technique[J]. Chinese Journal of Lasers, 44, 0104001(2017).

[15] Technology Organization. TR-SET-065-P3[R]. Vagni F. Survey of hyperspectral, multispectral imaging technologies. Neuilly-sur-Seine Cedex, France: North Atlantic Treaty Organization, Research(2007).

[16] Lenz R, Meer P, Hauta-Kasari M. Spectral-based illumination estimation and color correction[J]. Color Research & Application, 24, 98-111(1999). http://onlinelibrary.wiley.com/doi/10.1002/(SICI)1520-6378(199904)24:2<98::AID-COL5>3.0.CO;2-E/pdf

[17] Vala H J, Baxi A. A Review on OTSU image segmentation algorithm[J]. International Journal of Advanced Research in Computer Engineering & Technology, 2, 387-389(2013).