Measurement of Surface Defects of Optical Elements Based on Spectral Estimation and Multispectral Technique

Yang Yanruo; Bu Yang; Xu Jinghao; Wang Shaoqing; Wang Xiangzhao; Li Jie

doi:10.3788/CJL201946.0904002

Chinese Journal of Lasers, Volume. 46, Issue 9, 904002(2019)

Measurement of Surface Defects of Optical Elements Based on Spectral Estimation and Multispectral Technique

Yang Yanruo^1,2, Bu Yang^1、*, Xu Jinghao¹, Wang Shaoqing¹, Wang Xiangzhao¹, and Li Jie³

¹Laboratory of Information Optics and Optical Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621000, China

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Yang Yanruo, Bu Yang, Xu Jinghao, Wang Shaoqing, Wang Xiangzhao, Li Jie. Measurement of Surface Defects of Optical Elements Based on Spectral Estimation and Multispectral Technique[J]. Chinese Journal of Lasers, 2019, 46(9): 904002

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Paper Information

Category: Measurement and metrology

Received: Mar. 5, 2019

Accepted: --

Published Online: Sep. 10, 2019

The Author Email: Yang Bu (buyang@siom.ac.cn)

DOI:10.3788/CJL201946.0904002

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology