Chinese Journal of Liquid Crystals and Displays, Volume. 37, Issue 12, 1553(2022)
Fabrication of high-resolution active matrix driven GaN-based Micro-LED chips
[23] FANG R. ICP etching study of Ⅲ-Ⅴ semiconductor materials and ITO films[D](2010).
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Ming-shui HUANG, Jun-yang NIE, Ming-yang LIU, Yang LI, Kui PAN, Li-ying DENG, Tian-xi YANG, Zhong-hang HUANG, Jie SUN, Qun YAN, Tai-liang GUO. Fabrication of high-resolution active matrix driven GaN-based Micro-LED chips[J]. Chinese Journal of Liquid Crystals and Displays, 2022, 37(12): 1553
Category: Research Articles
Received: Aug. 22, 2022
Accepted: --
Published Online: Nov. 30, 2022
The Author Email: Jie SUN (jie.sun@fzu.edu.cn)