Journal of Synthetic Crystals, Volume. 50, Issue 6, 1002(2021)
Numerical Simulation Study on Growth Rate and Gas Reaction Path of AlN-MOCVD with Close-Coupled Showerhead Reactor
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WAN Xu, ZUO Ran. Numerical Simulation Study on Growth Rate and Gas Reaction Path of AlN-MOCVD with Close-Coupled Showerhead Reactor[J]. Journal of Synthetic Crystals, 2021, 50(6): 1002
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Received: Apr. 12, 2021
Accepted: --
Published Online: Aug. 23, 2021
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CSTR:32186.14.
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