Chinese Journal of Lasers, Volume. 36, Issue 5, 1209(2009)
Heteroepitaxial 4H-SiC Films Growth on AlN/Si(111) Composite Substrates
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Wu Jun, Wang Ronghua, Han Ping, Ge Ruiping, Mei Qin, Yu Fei, Zhao Hong, Xie Zili, Zhang Rong, Zheng Youdou. Heteroepitaxial 4H-SiC Films Growth on AlN/Si(111) Composite Substrates[J]. Chinese Journal of Lasers, 2009, 36(5): 1209
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