Chinese Journal of Lasers, Volume. 52, Issue 14, 1402115(2025)

Numerical Simulation of Multi‐Physics Coupling in Water‐Jet Guided Laser Machining for Monocrystalline Silicon (Invited)

Hui Jiao, Ping Huang, Guanghui Zhang, Xinping He, Zhichuang Chen, Yuxing Huang, Jia Zhou, and Yuhong Long*
Author Affiliations
  • School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology, Guilin 541010, Guangxi , China
  • show less
    References(30)

    [1] Li X, Song Q M, Zhang X Q et al. Laser processing of carbon fiber reinforced polymer composites and their application in aerospace field (invited)[J]. Chinese Journal of Lasers, 51, 0402101(2024).

    [3] Hu K X, Li F Y, Zhou Y et al. Thermal-fluid coupling numerical simulation study of temperature field and molten pool morphology of laser direct energy deposition[J]. Laser & Optoelectronics Progress, 61, 2114003(2024).

    [7] Li C Q. Research on water-jet guided laser micromachining system and key technologies[D](2012).

    [8] Xu J J. Basic research on the water-jet guided laser processing technology of SiCf/SiC composites[D](2019).

    [12] Zhan C J, Li C F, Pan Y C et al. Analysis of fluid flow in micro-waterjet guided laser precision drilling process[J]. Chinese Quarterly of Mechanics, 32, 159-165(2011).

    [13] Tan S N. Research on water-jet guided laser machining technology of SiCp/Al composite[D](2014).

    [19] Ma G Y, Wang H Y, Ma S Y et al. Simulation of coaxial powder feeding laser directed energy deposition of AlCoCrFeNi high entropy alloys based on DPM‐VOF method[J]. Chinese Journal of Lasers, 51, 2402301(2024).

    [24] Li Y C, Wang L, Li H et al. Solidification microstructure volume of fluid phase field model for laser welding nickel-based alloys[J]. Chinese Journal of Lasers, 51, 1202102(2024).

    [30] Chen T N, Guo Z N, Zeng B W et al. Study on micro-hole polishing mechanism and experiments based on laser-induced cavitation bubbles[J]. China Mechanical Engineering, 29, 273-278, 285(2018).

    Tools

    Get Citation

    Copy Citation Text

    Hui Jiao, Ping Huang, Guanghui Zhang, Xinping He, Zhichuang Chen, Yuxing Huang, Jia Zhou, Yuhong Long. Numerical Simulation of Multi‐Physics Coupling in Water‐Jet Guided Laser Machining for Monocrystalline Silicon (Invited)[J]. Chinese Journal of Lasers, 2025, 52(14): 1402115

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Laser Forming Manufacturing

    Received: Apr. 28, 2025

    Accepted: Jun. 19, 2025

    Published Online: Jul. 14, 2025

    The Author Email: Yuhong Long (longyuhong@guet.edu.cn)

    DOI:10.3788/CJL250748

    CSTR:32183.14.CJL250748

    Topics