Chinese Optics Letters, Volume. 10, Issue 1, 013103(2012)
Thinning and polishing of cross-section of depth-graded WSi2/Si multilayer for linear zone plate application
[1] [1] W. Liu, G. E. Ice, J. Z. Tischler, A. Khounsary, C. Liu, L. Assoufid, and A. T. Macrander, Rev. Sci. Instrum. 76, 113701 (2005).
[2] [2] C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. K¨uchler, Appl. Phys. Lett. 87, 124103 (2005).
[3] [3] W. Chao, E. Anderson, G. P. Denbeaux, B. Harteneck, J. A. Liddle, D. L. Olynick, A. L. Pearson, and F. Salmassi, Opt. Lett. 28, 2019 (2003).
[4] [4] Ch. Morawe, O. Hignette, P. Cloetens, W. Ludwig, Ch. Borel, P. Bernard, and A. Rommeveaux, Proc. SPIE 6317, 63170F (2006).
[5] [5] H. C. Kang, J. Maser, G. B. Stephenson, C. Liu, R. Conley, A. T. Macrander, and S. Vogt, Phys. Rev. Lett. 96, 127401 (2006).
[6] [6] T. Koyama, S. Ichimaru, T. Tsuji, H. Takano, Y. Kagoshima, T. Ohchi, and H. Takenaka, Appl. Phys. Express 1, 117003 (2008).
[7] [7] H. C. Kang, H. Yan, R. P. Winarski, M. V. Holt, J. Maser, C. Liu, R. Conley, S. Vogt, A. T. Macrander, and G. B. Stephenson, Appl. Phys. Lett. 92, 221114 (2008).
[8] [8] C. Liu, R. Conley, and A. T. Macrander, Proc. SPIE 6317, 63170J (2006).
[9] [9] M. Tan, H. Li, Q. Huang, H. Zhou, T. Huo, X. Wang, and J. Zhu, Chin. Opt. Lett. 9, 023102 (2011).
[11] [11] L. D. Madsen, L. Weaver, and S. N. Jacobsen, Microsc. Res. Technol. 36, 354 (1997).
[12] [12] H. Gao, J. Cao, Y. Zhu, and C. Chen, Physics (in Chinese) 29, 610 (2000).
[14] [14] H. C. Kang, G. B. Stephenson, C. Liu, R. Conley, R. Khachatryan, M. Wieczorek, A. T. Macrander, H. Yan, J. Maser, J. Hiller, and R. Koritala, Rev. Sci. Instrum. 78, 046103 (2007).
[15] [15] S. Rehbein, P. Guttmann, S. Werner, and G. Schneider, J. Vac. Sci. Technol. B 25, 1789 (2007).
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Qiushi Huang, Jingtao Zhu, Haochuan Li, Zhengxiang Shen, Xiaoqiang Wang, Zhanshan Wang, Yongjian Tang, "Thinning and polishing of cross-section of depth-graded WSi2/Si multilayer for linear zone plate application," Chin. Opt. Lett. 10, 013103 (2012)
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Received: Apr. 11, 2011
Accepted: Jun. 14, 2011
Published Online: Aug. 29, 2011
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