Chinese Optics Letters, Volume. 10, Issue 1, 013103(2012)

Thinning and polishing of cross-section of depth-graded WSi2/Si multilayer for linear zone plate application

Qiushi Huang, Jingtao Zhu, Haochuan Li, Zhengxiang Shen, Xiaoqiang Wang, Zhanshan Wang, and Yongjian Tang
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Qiushi Huang, Jingtao Zhu, Haochuan Li, Zhengxiang Shen, Xiaoqiang Wang, Zhanshan Wang, Yongjian Tang, "Thinning and polishing of cross-section of depth-graded WSi2/Si multilayer for linear zone plate application," Chin. Opt. Lett. 10, 013103 (2012)

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Received: Apr. 11, 2011

Accepted: Jun. 14, 2011

Published Online: Aug. 29, 2011

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DOI:10.3788/col201210.013103

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