Chinese Journal of Lasers, Volume. 36, Issue 6, 1559(2009)

Study on Surface Roughness of Substrates under Different Cleaning Techniques by Total Integrated Scatter

Hou Haihong1、*, Shen Jian2, Zhang Dawei2, and Fan Zhengxiu2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(12)

    [1] [1] Liu Ming, Liu Zhiwen, Gu Jianfeng et al.. Effect of sapphire substrate pre-treatment on the growth of ZnO films[J]. Acta Physica Sinica, 2008, 57(2): 1133~1140

    [5] [5] Xie Qinglian, Yan Shaolin, Zhao Xinjie et al.. Effects of an nealing of r-cut sapphire substrate on its surface morphology and the growth of CeO2 buffer layers and the Tl-2212 superconducting films[J]. Acta Physica Sinica, 2008, 57(1): 519~525

    [8] [8] J. A. Detrio, S. M. Miner. Standardized total integrated scatter measurements of optical surfaces[J]. Opt. Eng., 1985, 24: 419~424

    [9] [9] K. J. Stout, C. Obray, J. Jungles. Specification and control of surface finish: empiricism versus dogmatism[J]. Opt. Eng., 1985, 24: 414~419

    [10] [10] Hou Haihong, Sun Xilian, Shen Yanming et al.. Roughness and light scattering of ZrO2 thin films deposited by electron evaporation[J]. Acta Physica Sinica, 2006, 55(6): 3124~3127

    [11] [11] H. H. Hou, K. Yi, S. Z. Shang et al.. Measurements of light scattering from glass substrates by total integrated scattering [J]. Appl. Opt., 2005, 44(29): 6163~6166

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    [1] Gong Lei, Wu Zhensen. Analysis of Light Scattering about Slightly Non-Spherical Nanoparticles on Wafers[J]. Chinese Journal of Lasers, 2011, 38(1): 110001

    [2] Shi Peng, Fu Xiuhua, Sun Yan, Wei Zixun, Mei Yushan. Design and Fabrication of Double Wavelength Laser Protective Infrared Antireflection Coatings[J]. Chinese Journal of Lasers, 2011, 38(4): 407003

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    Hou Haihong, Shen Jian, Zhang Dawei, Fan Zhengxiu. Study on Surface Roughness of Substrates under Different Cleaning Techniques by Total Integrated Scatter[J]. Chinese Journal of Lasers, 2009, 36(6): 1559

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    Paper Information

    Category: materials and thin films

    Received: Jul. 8, 2008

    Accepted: --

    Published Online: Jun. 8, 2009

    The Author Email: Haihong Hou (haihonghou@siom.ac.cn)

    DOI:

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