Chinese Journal of Lasers, Volume. 36, Issue 6, 1559(2009)
Study on Surface Roughness of Substrates under Different Cleaning Techniques by Total Integrated Scatter
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Hou Haihong, Shen Jian, Zhang Dawei, Fan Zhengxiu. Study on Surface Roughness of Substrates under Different Cleaning Techniques by Total Integrated Scatter[J]. Chinese Journal of Lasers, 2009, 36(6): 1559
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