Fig. 1. High-precision electro-optic modulated ellipsometric stress sensing system

Fig. 2. Stress-loading device

Fig. 3. Schematic diagram of stress detection

Fig. 4. Ellipsometric amplitude and phase of stainless steel at different angles of incidence

Fig. 5. Ellipsometric signal in the proximity of the extinction points. (a) Signal in the time domain and (b) the corresponding signal in the frequency domain

Fig. 6. Ellipsometric signal in the proximity of the non-zero linear working point. (a) Signal in the time domain and (b) the corresponding signal in the frequency domain

Fig. 7. Ellipsometric stress results of 304 stainless-steel under different optical axis directions. (a) Optical axis parallel to the x-direction; (b) optical axis parallel to the y-direction