Chinese Optics, Volume. 18, Issue 3, 691(2025)

High-precision electro-optic modulated ellipsometric stress sensing system

Min CHEN1, Zhi LI2, Wei LIU2、*, and Yu NIU3、*
Author Affiliations
  • 1CISDI Information Technology (Chongqing) Co., Ltd., Chongqing 401329, China
  • 2Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China
  • 3School of Fundamental Physics and Mathematical Sciences, Hangzhou Institute for Advanced Study, UCAS, Hangzhou 310024, China
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    To achieve high-precision residual stress detection in key components in precision manufacturing, an electro-optic modulated ellipsometric stress sensing system has been established. This study focused on the ellipsometric signal response of common 304 stainless-steel materials in engineering under uniaxial tensile stress conditions. Firstly, based on the fundamental principles of reflection ellipsometry, the relationship between the ellipsometric signal and the ordinary and extraordinary refractive indices was established for different optical axis directions. Secondly, the working point of ellipsometric stress sensing was optimized for stainless steel materials. By comparing the ellipsometric signals at the extinction point and the non-zero linear working point, it was demonstrated that the non-zero linear condition is suitable for stress signal sensing. Finally, the stress-induced ellipsometric signals were measured under different optical axis directions. The experimental results indicate that for 304 stainless steel, the system's minimum stress detection limit is 7.84 kPa, and the stress detection accuracy of the system is better than 7.84 kPa. This system can be utilized for high-precision stress detection requirements in metal workpieces in precision manufacturing.

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    Min CHEN, Zhi LI, Wei LIU, Yu NIU. High-precision electro-optic modulated ellipsometric stress sensing system[J]. Chinese Optics, 2025, 18(3): 691

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    Paper Information

    Category: Special Column on Space-based Gravitational Wave Detection

    Received: Dec. 12, 2023

    Accepted: Feb. 6, 2024

    Published Online: Jun. 16, 2025

    The Author Email:

    DOI:10.37188/CO.2023-0222

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