Laser & Optoelectronics Progress, Volume. 59, Issue 13, 1322004(2022)
Study on Continuation Correction of Ion Beam Polishing to Remove Border Effect
Figures & Tables(9)
Fig. 2. Simulation removal diagrams of different continuation methods. (a) Initial surface shape; (b) surface shape after polynomial continuation; (c) surface shape after slope continuation; (d) surface shape after plane continuation
Fig. 3. Surface shapes after simulation removal. (a) Surface shape after polynomial continuation simulation; (b) surface shape after slope continuation simulation; (c) surface shape after plane continuation simulation
Fig. 4. Initial surface shape. (a) Surface shape of lens A; (b) surface shape of lens B; (c) surface shape of lens C
Fig. 5. Surface shape after processing. (a) Polynomial continuation ; (b) slope continuation ; (c) plane continuation
Fig. 6. Boundary surfaces after processing. (a) Polynomial continuation; (b) slope continuation; (c) plane continuation
Table 1. Simulation results of different continuation methods
View tableTable 1. Simulation results of different continuation methods
Simulation result Polynomial continuation Slope continuation Plane continuation Simulation time /min 51.73 54.32 55.49 PV /nm 65.32 65.80 67.28 RMS /nm 5.2055 6.0100 6.1279
Table 2. RMS values of surface shape before and after processing by different continuation methods
View tableTable 2. RMS values of surface shape before and after processing by different continuation methods
Simulation result Polynomial continuation Slope continuation Plane continuation Before processing
RMS /nm
19.26 31.70 30.00 After processing
RMS /nm
12.23 19.84 16.80
Table 3. Boundary RMS values of surface shape before and after processing by different continuation methods
View tableTable 3. Boundary RMS values of surface shape before and after processing by different continuation methods
Simulation result Polynomial continuation Slope continuation Plane continuation Before processing
RMS /nm
137.23 107.17 105.58 After processing
RMS /nm
56.72 62.43 68.85
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Di Zhou, Shilei Jiang, Guobin Sun, Le Kang, Weiguo Liu. Study on Continuation Correction of Ion Beam Polishing to Remove Border Effect[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1322004
Paper Information
Category: Optical Design and Fabrication
Received: Aug. 30, 2021
Accepted: Oct. 27, 2021
Published Online: Jun. 9, 2022
The Author Email: Shilei Jiang (jiangshilei8@163.com)
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