Lithographic Tool-Matching Method Based on Differential Evolution Algorithm

Yanjie Mao; Sikun Li; Xiangzhao Wang; Yayi Wei

doi:10.3788/AOS201939.1222002

Acta Optica Sinica, Volume. 39, Issue 12, 1222002(2019)

Lithographic Tool-Matching Method Based on Differential Evolution Algorithm

Yanjie Mao^1,2, Sikun Li^1,2、*, Xiangzhao Wang^1,2、**, and Yayi Wei³

¹Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³Integrated Circuit Advanced Process R & D Center, Institute of Microelectronics, Chinese Academy of Science, Beijing 100029, China;

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Yanjie Mao, Sikun Li, Xiangzhao Wang, Yayi Wei. Lithographic Tool-Matching Method Based on Differential Evolution Algorithm[J]. Acta Optica Sinica, 2019, 39(12): 1222002

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Paper Information

Category: Optical Design and Fabrication

Received: Jun. 26, 2019

Accepted: Aug. 13, 2019

Published Online: Dec. 6, 2019

The Author Email: Li Sikun (lisikun@siom.ac.cn), Wang Xiangzhao (wxz26267@siom.ac.cn)

DOI:10.3788/AOS201939.1222002

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