Piezoelectrics & Acoustooptics, Volume. 45, Issue 6, 828(2023)
Temperature Compensation Method for MEMS Pressure
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SensorsLIU Qiang, WEI Guiling2, HUANG Jing, GUO Wenxin, HE Xiangjun, SUN Shenghou. Temperature Compensation Method for MEMS Pressure[J]. Piezoelectrics & Acoustooptics, 2023, 45(6): 828
Received: Aug. 29, 2023
Accepted: --
Published Online: Jan. 4, 2024
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