Piezoelectrics & Acoustooptics, Volume. 45, Issue 6, 828(2023)

Temperature Compensation Method for MEMS Pressure

SensorsLIU Qiang1, WEI Guiling22, HUANG Jing2, GUO Wenxin3, HE Xiangjun1, and SUN Shenghou1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(3)

    [2] [2] LIU Yan,WANG Hai,ZHAO Wei,et al.Thermal-performance instability in piezoresistive sensors:Inducement and improvement[J].Sensors,2016,16(12):1984.

    [5] [5] WANG Huan,ZENG Qinghua,ZHANG Zongyu,et al.Research on temperature compensation of multi-channel pressure scanner based on an improved cuckoo search optimizing a BP neural network[J].Micromachines,2022,13(8):1351

    [6] [6] LI Ji,HU Guoqing,ZHOU Yonghong,et al.Study on temperature and synthetic compensation of piezo-resistive differential pressure sensors by coupled simulated annealing and simplex optimized kernel extreme learning machine[J].Sensors,2017,17(4):894.

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    SensorsLIU Qiang, WEI Guiling2, HUANG Jing, GUO Wenxin, HE Xiangjun, SUN Shenghou. Temperature Compensation Method for MEMS Pressure[J]. Piezoelectrics & Acoustooptics, 2023, 45(6): 828

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    Paper Information

    Received: Aug. 29, 2023

    Accepted: --

    Published Online: Jan. 4, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.06.008

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