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Piezoelectrics & Acoustooptics, Volume. 45, Issue 6, 828(2023)

Temperature Compensation Method for MEMS Pressure

SensorsLIU Qiang1, WEI Guiling22, HUANG Jing2, GUO Wenxin3, HE Xiangjun1, and SUN Shenghou1
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    SensorsLIU Qiang, WEI Guiling2, HUANG Jing, GUO Wenxin, HE Xiangjun, SUN Shenghou. Temperature Compensation Method for MEMS Pressure[J]. Piezoelectrics & Acoustooptics, 2023, 45(6): 828

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    Paper Information

    Received: Aug. 29, 2023

    Accepted: --

    Published Online: Jan. 4, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.06.008

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology