[1] [1] J. Korvink and O. Paul, (eds.) MEMS A Practical Guide to Design, Analysis and Applications (William Andrew Publishing, Norwich, 2006).

[2] [2] W. Osten, (ed.) Optical Inspection of Microsystems (CRC Press, Boca Raton, 2006).

[3] [3] W. Osten, (ed.) Optical Microsystems Metrology I. Special Issue of Opt. Lasers Eng. 36, (2) (2001).

[4] [4] W. Osten, (ed.) Optical Microsystems Metrology II. Special Issue of Opt. Lasers Eng. 36, (5) (2001).

[5] [5] J. Gaspar, M. Schmidt, J. Held, and O. Paul, in Proceedings of IEEE MEMS 2008 439 (2008).

[6] [6] U. Schnars, J. Opt. Soc. Am. A 11, 2011 (1994).

[7] [7] G. Pedrini, Y. L. Zou, and H. J. Tiziani, J. Mod. Opt. 42, 367 (1995).

[8] [8] G. Pedrini and H. J. Tiziani, “Digital holographic interferometry” in P. K. Rastogi, (ed.) Digital Speckle Pattern Interferometry and Related Techniques (Wiley, Chichester, 2001) pp.337-362.

[9] [9] S. Schedin, G. Pedrini, H. J. Tiziani, and F. Mendoza, Appl. Opt. 38, 7056 (1999).

[10] [10] K. Creath, Appl. Opt. 24, 3053 (1985).

[11] [11] R. Jones and C. Wykes, Holographic and Speckle Interferometry (2nd edn.) (Cambridge University Press, Cambridge, 1989).

[12] [12] M. Lehmann, Appl. Opt. 36, 3657 (1997).

[13] [13] G. Pedrini, J. Gaspar, T. Wu, W. Osten, and O. Paul, Opt. Lasers Eng. 47, 203 (2009).

[14] [14] G. Pedrini, J. Gaspar, W. Osten, and O. Paul, “Development of reference standards for the calibration of optical systems used in the measurement of microcomponents” Strain (Published Online: Jan. 23, 2009).

[15] [15] “Guide to the expression on uncertainty in measurement” DIN V ENV 13005 (1999).

[16] [16] B. N. Taylor and C. E. Kuyatt, “NIST technical note 1297 1994 edition guidelines for evaluating and expressing the uncertainty of NIST measurement results” (1994).