Chinese Optics Letters, Volume. 7, Issue 12, 1109(2009)
Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry
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Invited Paper, "Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry," Chin. Opt. Lett. 7, 1109 (2009)
Paper Information
Received: Sep. 7, 2009
Accepted: --
Published Online: Dec. 18, 2009
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