Chinese Journal of Lasers, Volume. 52, Issue 18, 1803031(2025)

Fabrication and Characterizations of 12-inch n-Type 4H-SiC Single Crystal Substrates (Invited)

Xianglong Yang1,2、***, Xixi Xiong1,2, Jiaxin Zhang1,2, Hongyu Shao1,2, Xiufang Chen1,2、*, Xuejian Xie1,2, Rongkun Wang1,2, Xiufei Hu1,2, Guanglei Zhong1,2, Guojian Yu3, Guojie Hu3, Muqing Zhang3, Xiaobo Hu1,2, and Xiangang Xu1,2、**
Author Affiliations
  • 1State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, Shandong , China
  • 2Institute of Novel Semiconductors, Shandong University, Jinan 250100, Shandong , China
  • 3Guangzhou Summit Crystal Semiconductor Co,. Ltd., Guangzhou 511458, Guangdong , China
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    References(18)

    [5] Yang X L, Chen X F, Xie X J et al. Growth of 8 inch conductivity type 4H-SiC single crystals[J]. Journal of Synthetic Crystals, 51, 1745-1748(2022).

    [6] Lou Y F, Gong T C, Zhang W et al. Fabrication and characterizations of 8-inch n type 4H-SiC single crystal substrate[J]. Journal of Synthetic Crystals, 51, 2131-2136(2022).

    [7] Yang K, Chen X F, Yang X L et al. Growth of high purity semi-insulting 4H-SiC single crystals[J]. Journal of Synthetic Crystals, 43, 3055-3057(2014).

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    Xianglong Yang, Xixi Xiong, Jiaxin Zhang, Hongyu Shao, Xiufang Chen, Xuejian Xie, Rongkun Wang, Xiufei Hu, Guanglei Zhong, Guojian Yu, Guojie Hu, Muqing Zhang, Xiaobo Hu, Xiangang Xu. Fabrication and Characterizations of 12-inch n-Type 4H-SiC Single Crystal Substrates (Invited)[J]. Chinese Journal of Lasers, 2025, 52(18): 1803031

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    Paper Information

    Category: Materials

    Received: Jun. 23, 2025

    Accepted: Jul. 21, 2025

    Published Online: Sep. 17, 2025

    The Author Email: Xianglong Yang (yangxl2016@sdu.edu.cn), Xiufang Chen (cxf@sdu.edu.cn), Xiangang Xu (xxu@sdu.edu.cn)

    DOI:10.3788/CJL250987

    CSTR:32183.14.CJL250987

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