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Acta Optica Sinica, Volume. 44, Issue 15, 1513032(2024)

On-Wafer and In-Line Measurement of Optoelectronic Integrated Chips Based on Photonic Sampling (Invited)

Xinhai Zou1, Junfeng Zhu1, Chao Jing1, Zhihui Li1,2, Naidi Cui2, Junbo Feng2, Yali Zhang1, Zhiyao Zhang1, Yong Liu1, Shangjian Zhang1、*, and Ninghua Zhu3
Author Affiliations
  • 1School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, Sichuan , China
  • 2United Microelectronics Center, Chongqing 400031, China
  • 3Xiongan Institute of Innovation, Baoding 071899, Hebei , China
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    Xinhai Zou, Junfeng Zhu, Chao Jing, Zhihui Li, Naidi Cui, Junbo Feng, Yali Zhang, Zhiyao Zhang, Yong Liu, Shangjian Zhang, Ninghua Zhu. On-Wafer and In-Line Measurement of Optoelectronic Integrated Chips Based on Photonic Sampling (Invited)[J]. Acta Optica Sinica, 2024, 44(15): 1513032

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    Paper Information

    Category: Integrated Optics

    Received: Apr. 17, 2024

    Accepted: Jun. 6, 2024

    Published Online: Jul. 31, 2024

    The Author Email: Zhang Shangjian (sjzhang@uestc.edu.cn)

    DOI:10.3788/AOS240856

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology