Fig. 1. Schematic diagram of high-speed optoelectronic chip measurement. (a) Electro-optical modulator chip measurement; (b) photodetector chip measurement

Fig. 2. Signal flow graphs of two-port network of optoelectronic chip. (a) Electro-optical modulator chip; (b) photodetector chip

Fig. 3. Enlarged image of wafer and chip. (a) Image of wafer under test; (b) single wafer chip; (c) electro-optical modulator chip; (d) photodetector chip

Fig. 4. Typical electrical spectra and measured results of photonic up-conversion and down-conversion sampling. (a) Typical electrical spectrm of photonic down-conversion sampling; (b) typical electrical spectrm of photonic up-conversion sampling; (c) measured results of photonic up-conversion and down-conversion sampling components

Fig. 5. Measurement results of uneven response of optical frequency comb. (a) Autocorrelation function curves of optical pulse; (b) calculation results of uneven response

Fig. 6. Comparison of results before and after deducting the uneven response of optical frequency comb

Fig. 7. Obtained response parameters. (a) S-parameter of AN-A; (b) S-parameter of AN-B; (c) reflection coefficient of the electro-optical chip to be measured; (d) system parameters of microwave network analyzer

Fig. 8. Degradation responses of AN-A and AN-B

Fig. 9. Intrinsic frequency responses of electro-optical modulator chip

Fig. 10. Intrinsic frequency responses of photodetector chip

Fig. 11. Uneven response p_n/p₁ of optical frequency comb