Journal of Synthetic Crystals, Volume. 51, Issue 9-10, 1673(2022)
Dislocations in 4H Silicon Carbide Single Crystals
Owing to the advantages of wide bandgap, high carrier mobility, high thermal conductivity and high stability, 4H silicon carbide (4H-SiC) has shown great potential in high-power electronics, RF/microwave electronics and quantum information. Although the industrialization of 6-inch 4H-SiC single crystals substrate and homoepitaxial films have been achieved after decades of development, the total dislocation density of 4H-SiC single crystal is still the order of magnitude of 103~104 cm-3, which poses great challenge to the realization of the full potential of 4H-SiC. This review introduces the classification and basic properties of dislocations in 4H-SiC single crystal. The mechanism of generation, transformation and annihilation of dislocation between different types of dislocations during the growth, wafering, and the homoepitaxy of 4H-SiC single crystals are systematically reviewed. By introducing the characterization and identification of dislocations in 4H-SiC, the effect of dislocations on the properties of 4H-SiC is shown, and the device performance and reliability are also presented.
Get Citation
Copy Citation Text
YANG Guang, LIU Xiaoshuang, LI Jiajun, XU Lingbo, CUI Can, PI Xiaodong, YANG Deren, WANG Rong. Dislocations in 4H Silicon Carbide Single Crystals[J]. Journal of Synthetic Crystals, 2022, 51(9-10): 1673
Category:
Received: Jul. 1, 2022
Accepted: --
Published Online: Nov. 18, 2022
The Author Email:
CSTR:32186.14.