Journal of Synthetic Crystals, Volume. 51, Issue 9-10, 1673(2022)

Dislocations in 4H Silicon Carbide Single Crystals

YANG Guang1,2, LIU Xiaoshuang2,3, LI Jiajun2,3, XU Lingbo1, CUI Can1, PI Xiaodong2,3, YANG Deren2,3, and WANG Rong2,3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Owing to the advantages of wide bandgap, high carrier mobility, high thermal conductivity and high stability, 4H silicon carbide (4H-SiC) has shown great potential in high-power electronics, RF/microwave electronics and quantum information. Although the industrialization of 6-inch 4H-SiC single crystals substrate and homoepitaxial films have been achieved after decades of development, the total dislocation density of 4H-SiC single crystal is still the order of magnitude of 103~104 cm-3, which poses great challenge to the realization of the full potential of 4H-SiC. This review introduces the classification and basic properties of dislocations in 4H-SiC single crystal. The mechanism of generation, transformation and annihilation of dislocation between different types of dislocations during the growth, wafering, and the homoepitaxy of 4H-SiC single crystals are systematically reviewed. By introducing the characterization and identification of dislocations in 4H-SiC, the effect of dislocations on the properties of 4H-SiC is shown, and the device performance and reliability are also presented.

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    YANG Guang, LIU Xiaoshuang, LI Jiajun, XU Lingbo, CUI Can, PI Xiaodong, YANG Deren, WANG Rong. Dislocations in 4H Silicon Carbide Single Crystals[J]. Journal of Synthetic Crystals, 2022, 51(9-10): 1673

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    Paper Information

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    Received: Jul. 1, 2022

    Accepted: --

    Published Online: Nov. 18, 2022

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    DOI:

    CSTR:32186.14.

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