Chinese Journal of Lasers, Volume. 40, Issue 10, 1008003(2013)

Analysis of Random Errors in High Precision Wavelength Phase Shifting Interferometers by Numerical Simulation

Wen Gang1,2、*, Su Dongqi1,2, Su Zhide1,2, Sui Yongxinm1, and Yang Huaijiang1
Author Affiliations
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  • 2[in Chinese]
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    CLP Journals

    [1] Zhong Chaoyang, Ju Aisong, Le Yanfen, Hou Wenmei. A Novel Differential Plane Mirror Interferometer[J]. Acta Optica Sinica, 2014, 34(11): 1112007

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    Wen Gang, Su Dongqi, Su Zhide, Sui Yongxinm, Yang Huaijiang. Analysis of Random Errors in High Precision Wavelength Phase Shifting Interferometers by Numerical Simulation[J]. Chinese Journal of Lasers, 2013, 40(10): 1008003

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    Paper Information

    Category: measurement and metrology

    Received: Apr. 7, 2013

    Accepted: --

    Published Online: Sep. 6, 2013

    The Author Email: Gang Wen (wengang9599@126.com)

    DOI:10.3788/cjl201340.1008003

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