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Chinese Journal of Lasers, Volume. 40, Issue 10, 1008003(2013)

Analysis of Random Errors in High Precision Wavelength Phase Shifting Interferometers by Numerical Simulation

Wen Gang1,2、*, Su Dongqi1,2, Su Zhide1,2, Sui Yongxinm1, and Yang Huaijiang1
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    Wen Gang, Su Dongqi, Su Zhide, Sui Yongxinm, Yang Huaijiang. Analysis of Random Errors in High Precision Wavelength Phase Shifting Interferometers by Numerical Simulation[J]. Chinese Journal of Lasers, 2013, 40(10): 1008003

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    Paper Information

    Category: measurement and metrology

    Received: Apr. 7, 2013

    Accepted: --

    Published Online: Sep. 6, 2013

    The Author Email: Gang Wen (wengang9599@126.com)

    DOI:10.3788/cjl201340.1008003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology