Fig. 1. Schematic diagram of Fourier synthesis illumination and uniformization device

Fig. 2. Simulation model of scanning and uniform trace of Fourier synthesis illumination

Fig. 3. Beam profile and intensity curve in the illuminated field. (a) (e) MEMS mirror for uniformity is not rotated; (b) (f) ±0.5°vibration; (c) (g) ±1.0°vibration; (d) (h) ±2.0°vibration

Fig. 4. Influence of illumination field uniformiry on Fourier synthesis illumination modes. (a) Disk; (b) annular; (c) dipole; (d) quadrupole

Fig. 5. Fourier synthesis illumination and uniformization experimental setup. (a) Photograph of setup; (b) no off-axis illumination; (c) quadrupole illumination; (d) quadrupole illumination and uniformity

Fig. 6. Relationship between uniformity of illumination field and rotation amplitude of MEMS mirror

Fig. 7. Relationship between uniformity of illumination field and rotation frequency of MEMS mirror