[1] MA Yong, KONG Chunyang. Electrical and optical properties and applications of In2O3∶Sn (ITO) films[J]. Journal of Chongqing University, 25, 114-117(2002).

[2] QIU Yang, CHEN Yufeng, ZU Chengkui et al. Research progress of ITO thin films[J]. Advanced Ceramics, 37, 303-324(2016).

[3] ALEKSANDROVA M, KURTEV N, VIDEKOV V et al. Material alternative to ITO for transparent conductive electrode in flexible display and photovoltaic devices[J]. Microelectronic Engineering, 145, 112-116(2015).

[4] WU C C. Highly flexible touch screen panel fabricated with silver-inserted transparent ITO triple-layer structures[J]. RSC Advances, 8, 11862-11870(2018).

[5] CHU A K, TIEN W C, LAI S W et al. High-resistivity sol-gel ITO thin film as an interfacial buffer layer for bulk heterojunction organic solar cells[J]. Organic Electronics, 46, 99-104(2017).

[6] KAMLAGE G, BAUER T, OSTENDORF A et al. Deep drilling of metals by femtosecond laser pulses[J]. Applied Physics A-Materials Science & Processing, 77, 307-310(2003).

[7] YANG Jianjun, ZHAO Youbo, ZHANG Nan et al. Ablation of metallic targets by high-intensity ultrashort laser pulses[J]. Physical Review B, 76, 165430(2007).

[8] BARSCH N, KORBER K, OSTENDORF A et al. Ablation and cutting of planar silicon devices using femtosecond laser pulses[J]. Applied Physics A-Materials Science & Processing, 77, 237-242(2003).

[9] BOROWIEC A, HAUGEN H K. Femtosecond laser micromachining of grooves in indium phosphide[J]. Applied Physics A-Materials Science & Processing, 79, 521-529(2004).

[10] CHUNG S H, MAZUR E. Surgical applications of femtosecond lasers[J]. Journal of Biophotonics, 2, 557-572(2009).

[11] MORENO P, MENDEZ C, GARCIA A et al. Femtosecond laser ablation of carbon reinforced polymers[J]. Applied Surface Science, 252, 4110-4119(2006).

[12] CHEN Qian, ZHOU Ming, HUANG Zongming et al. Fabrication nanostructure on ITO films by femtosecond laser ablation[J]. Journal of Functional Materials, 42, 158-160(2011).

[15] LE HARZIC R, HUOT N, AUDOUARD E et al. Comparison of heat-affected zones due to nanosecond and femtosecond laser pulses using transmission electronic microscopy[J]. Applied Physics Letters, 80, 3886-3888(2002).

[16] MOMMA C, CHICHKOV B N, NOLTE S et al. Short-pulse laser ablation of solid targets[J]. Optics Communications, 129, 134-142(1996).

[17] LORAZO P, LEWIS L J, MEUNIER M. Short-pulse laser ablation of solids: From phase explosion to fragmentation[J]. Physical Review Letters, 91, 225502(2003).

[18] VENKATAKRISHNAN K, TAN B, NGOI B K A. Femtosecond pulsed laser ablation of thin gold film[J]. Optics and Laser Technology, 34, 199-202(2002).

[19] PECHOLT B, VENDAN M, DONG Y et al. Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication[J]. International Journal of Advanced Manufacturing Technology, 39, 239-250(2008).

[20] BONAMIS G, MISHCHICK K, AUDOUARD E et al. High efficiency femtosecond laser ablation with gigahertz level bursts[J]. Journal of Laser Applications, 31, 022205(2019).

[21] BUTKUS S, JUKNA V, PAIPULAS D et al. Micromachining of invar foils with GHz, MHz and kHz femtosecond burst modes[J]. Micromachines, 11, 733(2020).

[22] SCHWARZ S, RUNG S, ESEN C et al. Enhanced ablation efficiency using GHz bursts in micromachining fused silica[J]. Optics Letters, 46, 282-285(2021).

[23] KUDRYASHOV S I, SAMOKHVALOV A A, GOLUBEV Y D et al. Dynamic all-optical control in ultrashort double-pulse laser ablation[J]. Applied Surface Science, 537, 147940(2021).

[24] WANG Guoyan, SUN Jingya, JI Pengfei et al. Modulation and mechanism of shockwaves induced on metals by femtosecond laser double-pulse[J]. Journal of Physics D: Applied Physics, 53, 165104(2020).

[25] ELAHI P, AKCAALAN O, ERTEK C et al. High-power Yb-based all-fiber laser delivering 300 fs pulses for high-speed ablation-cooled material removal[J]. Optics Letters, 43, 535-538(2018).

[26] MISHCHIK K, BONAMIS G, QIAO J et al. High-efficiency femtosecond ablation of silicon with GHz repetition rate laser source[J]. Optics Letters, 44, 2193-2196(2019).

[27] RACIUKAITIS G. Ultra-short pulse lasers for microfabrication: a review[J]. IEEE Journal of Selected Topics in Quantum Electronics, 27, 1100112(2021).

[28] ZHANG Jin, WANG Sumei, JIANG Lan et al. Morphology control of nanostructure using microsphere-assisted femtosecond laser double-pulse ablation and chemical etching[J]. Applied Surface Science, 502, 144272(2020).

[29] DROMEY B, ZEPF M, LANDREMAN M et al. Generation of a train of ultrashort pulses from a compact birefringent crystal array[J]. Applied Optics, 46, 5142-5146(2007).

[30] WEINER A M. Femtosecond pulse shaping using spatial light modulators[J]. Review of Scientific Instruments, 71, 1929-1960(2000).

[31] CHEN Tianqi, YANG Jian, JIA Tianqing. A study on ablation quality of silicon by femtosecond laser pulse trains[J]. Acta Photonica Sinica, 50, 0650112(2021).

[32] LI Kang, HAN Ruozhong, SUO Mengqi et al. High quality nanogratings far beyond diffraction limits on silicon efficiently fabricated using femtosecond laser dual-beam interference direct writing[J]. Optics and Laser Technology, 181, 111505(2025).

[33] WANG Yilun, LI Baojia, LI Shuangshuang et al. Parameter optimization in femtosecond pulsed laser etching of fluorine-doped tin oxide films[J]. Optics and Laser Technology, 116, 162-170(2019).

[34] ZHANG Pan, CHEN Lei, CHEN Jianxiong et al. Material removal effect of microchannel processing by femtosecond laser[J]. Optics and Lasers in Engineering, 98, 69-75(2017).

[36] ZHANG Yuchan, JIANG Qilin, CAO Kaiqiang et al. Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser[J]. Photonics Research, 9, 839-847(2021).