Fig. 1. Schematic diagram of femtosecond laser pulse train generator based on F-P cavity

Fig. 2. Generation of the pulse train by the F-P cavity

Fig. 3. Indium content at different regions on processed ITO films

Fig. 4. SEM measurement area corresponding to Fig.3（b），（c）and（d）

Fig. 5. SEM images of etched lines at different scanning speeds（F = 0.2 J/cm²）

Fig. 6. SEM images of etched lines at different scanning speeds（F = 0.49 J/cm²）

Fig. 7. Comparison of LER of lines etched by Gaussian light and pulse train

Fig. 8. AFM images of cross sections of etched lines at different sub-pulse intervals（F = 0.49 J/cm²，v = 0.2 mm/s）

Fig. 9. SEM images of etched lines at different sub-pulse intervals（F = 0.49 J/cm²，v = 0.2 mm/s）

Fig. 10. Variation diagram of average width and inclination angle in Table 1

Fig. 11. SEM images of etched lines at different laser fluence（v = 0.2 mm/s，∆t = 150 ps）

Fig. 12. AFM images of cross sections of etched lines at different laser fluence（v = 0.2 mm/s，∆t = 150 ps）

Fig. 13. SEM images of rows of lines with different spatial period

Fig. 14. SEM images of rows of lines with different spatial period

Fig. 15. Dimensional parameter diagram and SEM image of complex wire

Fig. 16. Measurement of wire width