Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Chinese Journal of Lasers, Volume. 42, Issue 1, 103007(2015)

Fabrication of High-Aspect-Ratio All-Silicon Grooves Using Femtosecond Laser Irradiation and Wet Etching

Li Yanna1,2、*, Chen Tao1, Pan An1, Si Jinhai1, and Hou Xun1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (0)
    Equations (0)
    References (26)
    Cited By (2)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    Li Yanna, Chen Tao, Pan An, Si Jinhai, Hou Xun. Fabrication of High-Aspect-Ratio All-Silicon Grooves Using Femtosecond Laser Irradiation and Wet Etching[J]. Chinese Journal of Lasers, 2015, 42(1): 103007

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: laser manufacturing

    Received: Jun. 17, 2014

    Accepted: --

    Published Online: Dec. 19, 2014

    The Author Email: Yanna Li (liyanna@stu.xjtu.edu.cn)

    DOI:10.3788/cjl201542.0103007

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology