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Chinese Journal of Lasers, Volume. 42, Issue 1, 103007(2015)

Fabrication of High-Aspect-Ratio All-Silicon Grooves Using Femtosecond Laser Irradiation and Wet Etching

Li Yanna1,2、*, Chen Tao1, Pan An1, Si Jinhai1, and Hou Xun1
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  • 2[in Chinese]
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    Article index updated: Mar. 10, 2025

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    Li Yanna, Chen Tao, Pan An, Si Jinhai, Hou Xun. Fabrication of High-Aspect-Ratio All-Silicon Grooves Using Femtosecond Laser Irradiation and Wet Etching[J]. Chinese Journal of Lasers, 2015, 42(1): 103007

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    Paper Information

    Category: laser manufacturing

    Received: Jun. 17, 2014

    Accepted: --

    Published Online: Dec. 19, 2014

    The Author Email: Yanna Li (liyanna@stu.xjtu.edu.cn)

    DOI:10.3788/cjl201542.0103007

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology