[1] Zhou Y H, Chang L, He T T et al. Research on measurement technology of ultra-precision planar optics[J]. Chinese Journal of Nature, 45, 157-176(2023).

[2] Xu Q, Chen X H, Wang S F et al. Ultra-precision manufacturing technology of high power laser optics[J]. Acta Optica Sinica, 42, 1712004(2022).

[3] Xiang J H, Liu C L. Simulation of scattering characteristics of optical surface defects based on BRDF[J]. Optics & Optoelectronic Technology, 20, 54-60(2022).

[4] Xu X B, Duan M H, Fan X et al. Surface defect detection of transparent objects based on fringe modulation[J]. Acta Optica Sinica, 43, 0512003(2023).

[5] Xiang Y C, Lin Y X, Ren Z Y. Study on surface defect detection method of optical element[J]. Optical Instruments, 40, 78-87(2018).

[6] Lai L. The particle simulation of dynamic processes of laser damage induced by surface microdefects of KDP crystals[D], 28-70(2020).

[7] Lou W M, Cao P, Zhang D H et al. Optical element surface defect size recognition based on decision regression tree[J]. Applied Sciences, 10, 6536(2020).

[8] Su R, Liu J Y, Qiao X Y et al. Advances in scanning white light interferometry for surface topography measurement[J]. Laser & Optoelectronics Progress, 60, 0312005(2023).

[9] Li M Z, Hou X, Zhao W C et al. Current situation and development trend of aspheric optical surface defect detection technology (invited)[J]. Infrared and Laser Engineering, 51, 20220457(2022).

[10] Liu D, Yang Y Y, Wang L et al. Microscopic scattering imaging measurement and digital evaluation system of defects for fine optical surface[J]. Optics Communications, 278, 240-246(2007).

[11] Ni K Z, Cheng X, Huang B M et al. Quantitative evaluation of subsurface damage by improved total internal reflection microscopy[J]. Applied Sciences, 9, 1819(2019).

[12] Leach R, Evans C, He L Y et al. Open questions in surface topography measurement: a roadmap[J]. Surface Topography: Metrology and Properties, 3, 013001(2015).

[13] Gebhardt M, Truckenbrodt H, Harnisch B. Surface defect detection and classification with light scattering[J]. Proceedings of SPIE, 1500, 135-143(1991).

[14] Maure S, Albrand G, Amra C. Low-level scattering and localized defects[J]. Applied Optics, 35, 5573-5582(1996).

[15] Herffurth T, Schröder S, Trost M et al. Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor[J]. Applied Optics, 52, 3279-3287(2013).

[16] Geurts P, Ernst D, Wehenkel L. Extremely randomized trees[J]. Machine Learning, 63, 3-42(2006).

[17] Li Z, Zhang Q Y, Kong L H et al. Hardness characterization of GCr15 steel based on laser-induced breakdown spectroscopy and random forest[J]. Chinese Journal of Lasers, 49, 0911002(2022).

[18] Wang S T. Imaging theoretical modeling and system analysis of smooth surface defect evaluation based on light scattering method[D], 41-53(2015).

[19] Wu F. Detection canability improvement technology for weak defects on smooth surfaces based on dark field scattering[D], 26-28(2020).