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Acta Optica Sinica, Volume. 30, Issue 4, 1041(2010)

Probe Spot Position Error on the Accuracy of Focusing and Leveling Measurement System

Liao Feihong1、*, Li Xiaoping1, Chen Xuedong1, and Li Zhidan2
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    Liao Feihong, Li Xiaoping, Chen Xuedong, Li Zhidan. Probe Spot Position Error on the Accuracy of Focusing and Leveling Measurement System[J]. Acta Optica Sinica, 2010, 30(4): 1041

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 20, 2009

    Accepted: --

    Published Online: Apr. 20, 2010

    The Author Email: Feihong Liao (lfh159257@163.com)

    DOI:10.3788/aos20103004.1041

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology