Infrared and Laser Engineering, Volume. 47, Issue 2, 217003(2018)

Sensitivity analysis of different scan arcs for swing arm profilometer test

Xiong Ling1,2, Luo Xiao1, Qi Erhui1, Zhang Feng1, Xue Donglin1, and Zhang Xuejun1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(12)

    [1] [1] Anderson D S, Parks R E. A versatile profilometer for the measurement of aspherics [C]//OF&T Workshop Technical Digest, CA, 1990.

    [2] [2] Anderson D S, Burge J H. Swing-arm profilometry of aspherics [C]//Proc SPIE, 1995, 2536: 169-179.

    [3] [3] Su P, Oh C J, Parks R E, et al. Swing arm optical CMM for aspherics [C]//Proc SPIE, 2009, 7426: 74260J.

    [4] [4] Burge J H. Fabrication and testing of 1.4-m convex off-axis aspheric optical surfaces [C]//Proc SPIE, 2009, 7426: 7426L.

    [5] [5] Zhang Peng, Li Jie, Yu Guoyu, et al. Development of swinging part profilometer for optics[C]//Optics and Measurement 2016 International Conference, 2016: 101510B.

    [6] [6] Wei Zhongwei. Study on the error separation for the rotary table of swing arm profilometer[D]. Chengdu: Institute of Optics and Electronics, Chinese Academy of Sciences, 2014: 38-39. (in Chinese)

    [7] [7] Lin Chen, Jing Hongwei, Wei Zhongwei, et al. Research on the measurement technology of effective arm length of swing arm profilometer [C]//Proc SPIE, 2014, 9280: 92800P.

    [8] [8] Gao Mingxing, Jing Hongwei, Fan Tianquan, et al. Calibrating the axes of the swing arm profilometer by the four-based laser trackers[C]//Proc SPIE, 2015, 9623: 96230M.

    [10] [10] Qi Erhui, Luo Xiao, Zheng Ligong, et al. Optical testing of large optical flat mirror with non-circular pupil based on scanning pentaprism technology [J]. Journal of Optoelectronics Laser, 2014, 25(7): 1370-1375. (in Chinese)

    [11] [11] Qi Erhui, Luo Xiao, Li Ming, et al. Error analysis of scanning pentaprism system in optical testing on large aperture flat mirror.[J] Infrared and Laser Engineering, 2015, 44(2): 639-646. (in Chinese)

    Tools

    Get Citation

    Copy Citation Text

    Xiong Ling, Luo Xiao, Qi Erhui, Zhang Feng, Xue Donglin, Zhang Xuejun. Sensitivity analysis of different scan arcs for swing arm profilometer test[J]. Infrared and Laser Engineering, 2018, 47(2): 217003

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: 光电测量

    Received: Feb. 6, 2017

    Accepted: Mar. 15, 2017

    Published Online: Apr. 26, 2018

    The Author Email:

    DOI:10.3788/irla201847.0217003

    Topics