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Infrared and Laser Engineering, Volume. 47, Issue 2, 217003(2018)

Sensitivity analysis of different scan arcs for swing arm profilometer test

Xiong Ling1,2, Luo Xiao1, Qi Erhui1, Zhang Feng1, Xue Donglin1, and Zhang Xuejun1
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  • 2[in Chinese]
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    Xiong Ling, Luo Xiao, Qi Erhui, Zhang Feng, Xue Donglin, Zhang Xuejun. Sensitivity analysis of different scan arcs for swing arm profilometer test[J]. Infrared and Laser Engineering, 2018, 47(2): 217003

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    Paper Information

    Category: 光电测量

    Received: Feb. 6, 2017

    Accepted: Mar. 15, 2017

    Published Online: Apr. 26, 2018

    The Author Email:

    DOI:10.3788/irla201847.0217003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology