Laser & Optoelectronics Progress, Volume. 52, Issue 1, 13101(2015)
Study on the Properties of DLC Films with Si Doping Prepared by Rf-PECVD
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Yang Yongliang, Yue Li, Li Na, Tang Haolong. Study on the Properties of DLC Films with Si Doping Prepared by Rf-PECVD[J]. Laser & Optoelectronics Progress, 2015, 52(1): 13101
Category: Thin Films
Received: Apr. 30, 2014
Accepted: --
Published Online: Nov. 7, 2014
The Author Email: Yang Yongliang (310147155@qq.com)