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Laser & Optoelectronics Progress, Volume. 52, Issue 1, 13101(2015)

Study on the Properties of DLC Films with Si Doping Prepared by Rf-PECVD

Yang Yongliang1、*, Yue Li1, Li Na1, and Tang Haolong2
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    Yang Yongliang, Yue Li, Li Na, Tang Haolong. Study on the Properties of DLC Films with Si Doping Prepared by Rf-PECVD[J]. Laser & Optoelectronics Progress, 2015, 52(1): 13101

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    Paper Information

    Category: Thin Films

    Received: Apr. 30, 2014

    Accepted: --

    Published Online: Nov. 7, 2014

    The Author Email: Yang Yongliang (310147155@qq.com)

    DOI:10.3788/lop52.013101

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology